Micromachining of Polymethylmethacrylate and Polydimethylsiloxane Using Laser Plasma Soft X-rays

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ژورنال

عنوان ژورنال: Journal of Laser Micro/Nanoengineering

سال: 2011

ISSN: 1880-0688

DOI: 10.2961/jlmn.2011.03.0012